Spin Coating Unit

Spin Coating Unit

July 28, 2024

PROGRAMMABLE SPIN COATING UNIT:-

MAKE: HE (GMP/ISO 9001 – 2015/GMP/CE Certified )

 Model: HSC – 9000

Technical Specification: - 

 

  • Polypropylene Working Chamber (removable), size 6-inch dia, with transparent photo resist lid with interlock safety switch.
  • 500 – 9000 RPM 
  • Accuracy<±0.5% of Full Speed
  • Microprocessor Programmable Speed control with respect to time Preset editable programs of 1 program X 64 step 
  • Real time display of RPM, time and program stamps
  • Nonvolatile program memory
  • Input & control through soft touch key pad.
  • Vacuum release switch
  • Substrate size from 0. 04sq.inch (28 sq.mm) to 4.0 sq. inch   

        (for glass substrate) & 20.0 sq. inch (for silicon wafers)

  • Vacuum chuck: derlin made circular substrate holders of Dia 0.5”,1”,1.5”,2.0” inch 
  • Microprocessor control A C brush less motor
  • Acceleration 2000 rpm/sec (Maximum) use settable
  • Calibration option. 
  • Vacuum Dial gauge.
  • Frame: Epoxy coated MS.
  • Facility for interlocking with Vacuum Pump.
  • Tubing for Vacuum.
  • Gas Purging Attachment for Nitrogen. 
  • Spill drainage facility 
  • To operate on 230V ± 10%, 1 phase 50 Hz AC only.
  • Maximum Power 190W, Current 1.0 Amp.

 

Vacuum Pump: -

Make: HE (NSIC Regd, MSME Regd, ISO 9001 – 2015/14001-2015/13485-2016/FDA/ GMP/CE Certified)

 

Model

Technical Name 

HE115 N

Flow rate

50 Hz

42 L/min

60 Hz

60 Hz

50 L/min

 

Ultimate vacuum

Partial Pressure

Total Pressure

Total Pressure

 

Power

 

Inlet Port

Model

Technical Name 

HE115 N

Flow rate